The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
Apr. 27, 2012
Fabio Pellizzer, Cornate D'adda, IT;
Innocenzo Tortorelli, Moncalieri, IT;
Christina Papagianni, San Jose, CA (US);
Gianpaolo Spadini, Scotts Valley, CA (US);
Jong Won Lee, San Francisco, CA (US);
Fabio Pellizzer, Cornate D'adda, IT;
Innocenzo Tortorelli, Moncalieri, IT;
Christina Papagianni, San Jose, CA (US);
Gianpaolo Spadini, Scotts Valley, CA (US);
Jong Won Lee, San Francisco, CA (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
Material test structures having cantilever portions and methods of forming the same are described herein. As an example, a method of forming a material test structure includes forming a number of electrode portions in a first dielectric material, forming a second dielectric material on the first dielectric material, wherein the second dielectric material includes a first cantilever portion and a second cantilever portion, and forming a test material on the number of electrode portions, the first dielectric material, and the second dielectric material.