The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Jun. 03, 2011
Perry J. I. Justesen, Beverly, MA (US);
Allan D. Weed, Marblehead, MA (US);
William Davis Lee, Newburyport, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
Robert D. Rathmell, Murphy, TX (US);
Gary M. Cook, Newton, MA (US);
Perry J. I. Justesen, Beverly, MA (US);
Allan D. Weed, Marblehead, MA (US);
William Davis Lee, Newburyport, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
Robert D. Rathmell, Murphy, TX (US);
Gary M. Cook, Newton, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.