The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
May. 21, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Kenji Nagai, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); G01K 11/12 (2006.01);
U.S. Cl.
CPC ...
G01K 11/12 (2013.01); G01B 11/06 (2013.01); G01K 11/125 (2013.01);
Abstract
A light interference system and a substrate processing apparatus can suppress loss of reflection spectrum. The light interference systemincludes a light source, a coupler, multiple collimatorsA andB, a collimator, a mirror, a spectrometer, and an operation unit. The collimatorand the mirrorare provided at a side of multiple input terminals except a first input terminal and configured to send reflected lights from multiple output terminals to the multiple output terminals again.
Nagai, Kenji. (2015). Light interference system and substrate processing apparatus (U.S. Patent No. 8941843). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8941843
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile