The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Jul. 09, 2012
Applicants:
Cornelis Sander Kooijman, Veldhoven, NL;
Gerard Anne Nicolaas Van Veen, Waalre, NL;
Inventors:
Cornelis Sander Kooijman, Veldhoven, NL;
Gerard Anne Nicolaas van Veen, Waalre, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G01T 1/04 (2006.01); H01J 37/244 (2006.01); H01L 31/115 (2006.01); G01T 1/24 (2006.01); G01T 1/29 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G01T 1/24 (2013.01); G01T 1/2928 (2013.01); H01J 37/244 (2013.01); H01L 31/115 (2013.01); H01J 37/261 (2013.01); H01J 37/28 (2013.01); H01J 2237/24415 (2013.01); H01J 2237/2448 (2013.01);
Abstract
A detector with a Silicon Diode and an amplifier, and a feedback element in the form of, for example, a resistor or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch, the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta.