The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Aug. 12, 2013
Air Products and Chemicals, Inc., Allentown, PA (US);
Manchao Xiao, San Diego, CA (US);
Xinjian Lei, Vista, CA (US);
Heather Regina Bowen, Vista, CA (US);
Mark Leonard O'Neill, San Marcos, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A method for depositing a silicon containing film on a substrate using an organoaminosilane is described herein. The organoaminosilanes are represented by the formulas: wherein R is selected from a C-Clinear, branched, or cyclic, saturated or unsaturated alkyl group with or without substituents; a C-Caromatic group with or without substituents, a C-Cheterocyclic group with or without substituents, or a silyl group in formula C with or without substituents, Ris selected from a C-Clinear, branched, cyclic, saturated or unsaturated alkyl group with or without substituents; a C-Caromatic group with or without substituents, a C-Cheterocyclic group with or without substituents, a hydrogen atom, a silyl group with substituents and wherein R and Rin formula A can be combined into a cyclic group and Rrepresenting a single bond, (CH), chain, a ring, C-Cbranched alkyl, SiR, or SiH.