The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2015

Filed:

Nov. 08, 2013
Applicant:

Nthdegree Technologies Worldwide Inc., Tempe, AZ (US);

Inventors:

Richard A. Blanchard, Los Altos, CA (US);

William J. Ray, Fountain Hills, AZ (US);

Mark D. Lowenthal, Gilbert, AZ (US);

Xiaorong Cai, Mount Pleasant, SC (US);

Theodore Kamins, Palo Alto, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/4763 (2006.01); H01L 21/768 (2006.01); H01L 21/288 (2006.01); H01L 23/48 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76879 (2013.01); H01L 21/288 (2013.01); H01L 23/481 (2013.01); H01L 24/19 (2013.01); H01L 2224/83191 (2013.01); H01L 2224/76155 (2013.01); H01L 2224/73265 (2013.01);
Abstract

Vias (holes) are formed in a wafer or a dielectric layer. A low viscosity conductive ink, containing microscopic metal particles, is deposited over the top surface of the wafer to cover the vias. An external force is applied to urge the ink into the vias, including an electrical force, a magnetic force, a centrifugal force, a vacuum, or a suction force for outgassing the air in the vias. Any remaining ink on the surface is removed by a squeegee, spinning, an air knife, or removal of an underlying photoresist layer. The ink in the vias is heated to evaporate the liquid and sinter the remaining metal particles to form a conductive path in the vias. The resulting wafer may be bonded to one or more other wafers and singulated to form a 3-D module.


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