The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Feb. 10, 2012
Applicants:
Guillaume Gay, Grenoble, FR;
Thierry Baron, Saint Egreve, FR;
Eric Jalaguier, Saint Martin d'Uriage, FR;
Inventors:
Guillaume Gay, Grenoble, FR;
Thierry Baron, Saint Egreve, FR;
Eric Jalaguier, Saint Martin d'Uriage, FR;
Assignees:
Commissariat a l'Energie Atomique et aux Energies Alternatives, Paris, FR;
CNRS-Centre National de la Recherche Scientifique, Paris, FR;
Universite Joseph Fourier, Grenoble, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/28 (2006.01); H01L 21/308 (2006.01); H01L 29/423 (2006.01); H01L 29/788 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28273 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); H01L 29/42332 (2013.01); H01L 29/7881 (2013.01);
Abstract
A process for obtaining an array of nanodots () for microelectronic devices, characterized in that it comprises the following steps: