The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
Apr. 02, 2008
Applicants:
Manfred Schiekofer, Freising, DE;
Pietro Foglietti, Altdorf, DE;
Robert Maier, Freising, DE;
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/16 (2006.01); C30B 23/00 (2006.01); C30B 23/06 (2006.01); C30B 25/10 (2006.01); C30B 29/52 (2006.01);
U.S. Cl.
CPC ...
C30B 25/16 (2013.01); C30B 23/002 (2013.01); C30B 23/06 (2013.01); C30B 25/10 (2013.01); C30B 29/52 (2013.01);
Abstract
A method of controlling an epitaxial growth process in an epitaxial reactor. The method includes optimizing the thermocouple offset parameter for a second run by setting up a modeled output parameter value as a linear function of the actual output parameter value, and a second thermocouple offset parameter value.