The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2015
Filed:
May. 29, 2012
Applicant:
Jun Ho Son, Gyeongbuk, KR;
Inventor:
Jun Ho Son, Gyeongbuk, KR;
Assignee:
K.C. Tech Co., Ltd., Anseong-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 5/02 (2006.01); B24B 37/30 (2012.01); B24B 41/06 (2012.01);
U.S. Cl.
CPC ...
B24B 37/30 (2013.01); B24B 41/061 (2013.01);
Abstract
Provided is a membrane assembly of a carrier head in a chemical-mechanical polishing apparatus. The membrane assembly includes a main membrane and a circular ring. The main membrane has a wafer contacting surface in contact with a wafer while a chemical-mechanical polishing process is being performed. The circular ring is disposed at an edge portion of the main membrane and receives an air pressure to downwardly apply the air pressure to the main membrane at the edge portion.
Son, Jun. (2015). Membrane assembly and carrier head having the membrane assembly (U.S. Patent No. 8939817). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8939817
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile