The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2015
Filed:
Sep. 21, 2012
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Dow Global Technologies Llc, Midland, MI (US);
Vipul Jain, Westborough, MA (US);
D. Patrick Green, Midland, MI (US);
James W. Thackeray, Braintree, MA (US);
Brad C. Bailey, Midland, MI (US);
Su Jin Kang, Grafton, MA (US);
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Dow Global Technologies LLC, Midland, MI (US);
Abstract
A molecular glass compound comprises a vinyl ether adduct of an aromatic vinyl ether of formula C(R)═C(R)—O-(L)-Ar, and a calix[4]arene, wherein Rand Rare each independently a single bond, H, Calkyl, Chaloalkyl, Caryl, Chaloaryl, Caralkyl, or Chaloaralkyl, L is a Clinking group, n is 0 or 1, and Aris a halo-containing monocyclic, or substituted or unsubstituted polycyclic or fused polycyclic Caromatic-containing moiety, wherein Rand Rare connected to Arwhen either or both of Rand Ris a single bond and n is 0. A photoresist, comprising the molecular glass compound, a solvent, and a photoacid generator, a coated substrate, comprising (a) a substrate having one or more layers to be patterned on a surface thereof; and (b) a layer of a photoresist composition over the one or more layers to be patterned, and a method of forming the molecular glass compound, are also disclosed.