The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2015
Filed:
Jan. 21, 2011
Applicants:
Roger Alan Lindley, Santa Clara, CA (US);
Jingbao Liu, Sunnyvale, CA (US);
Bryan Y. Pu, San Jose, CA (US);
Keiji Horioka, Chiba, JP;
Inventors:
Roger Alan Lindley, Santa Clara, CA (US);
Jingbao Liu, Sunnyvale, CA (US);
Bryan Y. Pu, San Jose, CA (US);
Keiji Horioka, Chiba, JP;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/00 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32623 (2013.01); H01J 37/3266 (2013.01); H01J 37/32688 (2013.01);
Abstract
A magnetic field generator which provides greater control over the magnetic field is provided. The magnetic field generator has a plurality of overlapping main magnetic coil sections for forming a magnetic field generally parallel to the top surface of the supporting member. In other embodiments, sub-magnetic coil sections are placed symmetrically around the main magnetic coil sections.