The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2015
Filed:
Dec. 21, 2011
Christopher O. Lada, Los Gatos, CA (US);
Stuart Stephen Papworth Parkin, San Jose, CA (US);
Mahesh Govind Samant, San Jose, CA (US);
Christopher O. Lada, Los Gatos, CA (US);
Stuart Stephen Papworth Parkin, San Jose, CA (US);
Mahesh Govind Samant, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.