The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Jun. 08, 2011
Ryoichi Ishii, Hitachinaka, JP;
Takashi Doi, Hitachinaka, JP;
Osamu Sato, Kasumigaura, JP;
Yasushi Ebizuka, Hitachinaka, JP;
Ryoichi Ishii, Hitachinaka, JP;
Takashi Doi, Hitachinaka, JP;
Osamu Sato, Kasumigaura, JP;
Yasushi Ebizuka, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.