The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Feb. 27, 2013
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Mostafa Maazouz, Hillsboro, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 49/10 (2006.01); H01J 49/26 (2006.01); G01R 31/305 (2006.01); H01J 37/04 (2006.01); H01J 3/02 (2006.01);
U.S. Cl.
CPC ...
H01J 3/026 (2013.01); H01J 37/04 (2013.01);
Abstract
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.