The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Jan. 16, 2008
Applicants:
Tetsuo Fukuoka, Koshi, JP;
Takahiro Kitano, Koshi, JP;
Kazuo Terada, Koshi, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo-to, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A21B 1/00 (2006.01); F27B 17/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F27B 17/0025 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01);
Abstract
A heating device has a heating chamber. An initial temperature distribution is created in a surface of a substrate (wafer W) when the substrate is carried into the heating chamber. . . Temperature distribution creating means (heating lamps) creates a preheating temperature distribution in the substrate supported on a cooling plateat a waiting position before the substrate is carried into the heating chamberso as to level out the initial temperature distribution.