The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2015

Filed:

Aug. 22, 2013
Applicants:

Cheong Min Hong, Austin, TX (US);

Karthik Ramanan, Austin, TX (US);

Inventors:

Cheong Min Hong, Austin, TX (US);

Karthik Ramanan, Austin, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 27/06 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7831 (2013.01); H01L 29/66484 (2013.01); H01L 21/02601 (2013.01); H01L 27/0629 (2013.01); H01L 29/66181 (2013.01); H01L 29/66833 (2013.01); H01L 29/792 (2013.01);
Abstract

A method includes forming a first conductive layer over a substrate in a first region and second region of the substrate; patterning the first conductive layer to form a select gate in the first region and to remove the first conductive layer from the second region; forming a charge storage layer over the select gate and the substrate in the first region and over the substrate in the second region; forming a second conductive layer over the charge storage layer in the first and second regions; and patterning the second conductive layer and charge storage layer to form a control gate overlapping the select gate in the first region, wherein a first portion of the charge storage layer remains between the select gate and control gate, and to form an electrode in the second region, wherein a second portion of the charge storage layer remains between the electrode and substrate.


Find Patent Forward Citations

Loading…