The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Feb. 07, 2013
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Thomas Kunstmann, Laaber, DE;
Stefan Willkofer, Munich, DE;
Anja Gissibl, Regensburg, DE;
Johann Strasser, Schierling, DE;
Matthias Mueller, Regensburg, DE;
Eva-Maria Hess, Gremsdorf, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); C23F 1/02 (2006.01); C23F 1/08 (2006.01);
U.S. Cl.
CPC ...
C23F 1/02 (2013.01); C23F 1/08 (2013.01);
Abstract
Apparatuses and methods are provided where porous metal is deposited on a substrate, a mask is provided on the porous metal and then an etching is performed.