The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Dec. 20, 2010
Applicants:
Koji Tsunekawa, Tokyo, JP;
Hiroyuki Hosoya, Tama, JP;
Yoshinori Nagamine, Tama, JP;
Shinji Furukawa, Cupertino, CA (US);
Naoki Watanabe, Kawasaki, JP;
Inventors:
Koji Tsunekawa, Tokyo, JP;
Hiroyuki Hosoya, Tama, JP;
Yoshinori Nagamine, Tama, JP;
Shinji Furukawa, Cupertino, CA (US);
Naoki Watanabe, Kawasaki, JP;
Assignee:
Canon Anelva Corporation, Kanagawa-Ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); G11B 5/39 (2006.01); B82Y 10/00 (2011.01); B82Y 25/00 (2011.01); B82Y 40/00 (2011.01); C23C 14/14 (2006.01); C23C 14/22 (2006.01); G01R 33/09 (2006.01); H01F 10/32 (2006.01); H01F 41/18 (2006.01); H01F 41/30 (2006.01); H01L 43/12 (2006.01); G11B 5/31 (2006.01);
U.S. Cl.
CPC ...
G11B 5/3909 (2013.01); B82Y 10/00 (2013.01); B82Y 25/00 (2013.01); B82Y 40/00 (2013.01); C23C 14/14 (2013.01); C23C 14/225 (2013.01); C23C 14/3464 (2013.01); G01R 33/093 (2013.01); G01R 33/098 (2013.01); G11B 5/3903 (2013.01); H01F 10/3254 (2013.01); H01F 10/3272 (2013.01); H01F 41/18 (2013.01); H01F 41/302 (2013.01); H01L 43/12 (2013.01); G11B 5/3163 (2013.01); G11B 2005/3996 (2013.01); H01F 10/325 (2013.01);
Abstract
The magnetic anisotropy of a magnetic layer in a spin valve tunnel magnetoresistive element or giant magnetoresistive element is enhanced. Deposition of the magnetic layer is performed by making sputtering particles obliquely incident on a substrate from a certain incident direction at a certain incident angle.