The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Aug. 31, 2009
Gerald B. Wayton, Leicester, MA (US);
Peter Trefonas, Iii, Medway, MA (US);
Suzanne Coley, Mansfield, MA (US);
Tomoki Kurihara, Niigata, JP;
Gerald B. Wayton, Leicester, MA (US);
Peter Trefonas, III, Medway, MA (US);
Suzanne Coley, Mansfield, MA (US);
Tomoki Kurihara, Niigata, JP;
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Abstract
In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.