The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2015

Filed:

Jul. 12, 2011
Applicants:

Robert L. Bruce, White Plains, NY (US);

Geraud Jean-michel Dubois, San Jose, CA (US);

Theo J. Frot, Los Gatos, CA (US);

Willi Volksen, San Jose, CA (US);

Inventors:

Robert L. Bruce, White Plains, NY (US);

Geraud Jean-Michel Dubois, San Jose, CA (US);

Theo J. Frot, Los Gatos, CA (US);

Willi Volksen, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/768 (2006.01); H01L 21/3105 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3105 (2013.01); H01L 21/76822 (2013.01); H01L 2221/1047 (2013.01); H01L 21/7682 (2013.01); H01L 21/02203 (2013.01); H01L 21/76828 (2013.01);
Abstract

In one exemplary embodiment of the invention, a method includes: providing a structure having a first layer overlying a substrate, where the first layer includes a dielectric material having a plurality of pores; applying a filling material to a surface of the first layer; after applying the filling material, heating the structure to enable the filling material to at least partially fill the plurality of pores, where heating the structure results in residual filling material being left on the surface of the first layer; and after heating the structure, removing the residual filling material by applying a solvent wash.


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