The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2015

Filed:

May. 03, 2011
Applicants:

Upendra Avachat, Sunnyvale, CA (US);

Tony Chiang, Campbell, CA (US);

Craig Hunter, Los Gatos, CA (US);

Jian LI, Fremont, CA (US);

Guizhen Zhang, Santa Clara, CA (US);

Inventors:

Upendra Avachat, Sunnyvale, CA (US);

Tony Chiang, Campbell, CA (US);

Craig Hunter, Los Gatos, CA (US);

Jian Li, Fremont, CA (US);

Guizhen Zhang, Santa Clara, CA (US);

Assignee:

Intermolecular, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/05 (2014.01); C23C 14/06 (2006.01); C23C 14/16 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); H01L 27/142 (2014.01); H01L 31/032 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0516 (2013.01); C23C 14/0623 (2013.01); C23C 14/165 (2013.01); C23C 14/3464 (2013.01); C23C 14/5866 (2013.01); H01L 27/1423 (2013.01); H01L 31/0322 (2013.01); H01L 31/0326 (2013.01); H01L 21/02568 (2013.01); H01L 21/02614 (2013.01); H01L 21/02631 (2013.01); Y02E 10/541 (2013.01);
Abstract

The present disclosure is directed to methods of forming different types of CuZnSnS(CZTS) solar cells and Copper Indium Gallium DiSelenide (CIGS) solar cells that can be combinatorially varied and evaluated. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials.


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