The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2015

Filed:

Oct. 15, 2012
Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Maki Kawamura, Osaka, JP;

Junji Nakanishi, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/028 (2006.01); C07D 471/04 (2006.01); C07D 221/06 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); G03F 7/0392 (2013.01); G03F 7/0045 (2013.01);
Abstract

A chemical amplified photoresist composition containing a resin, an acid generator, and a compound of formula (X): wherein R, R, R, R, Rand Reach independently represent a hydrogen atom, a hydroxyl group, a carboxy group, —SO, —NH, a halogen atom, a mercapto group, a C1-C12 alkyl group optionally having a substituent, a C6-C30 aryl group optionally having a substituent, a C3-C12 cycloalkyl group optionally having a substituent, and Rand Reach independently represent a hydrogen atom, a hydroxyl group, a carboxy group, —SO, —NH, a halogen atom, a mercapto group, a C1-C12 alkyl group optionally having a substituent, a C6-C30 aryl group optionally having a substituent, or a C3-C12 cycloalkyl group optionally having a substituent, or Rand Rare bonded each other to form a ring together with carbon atoms binding Rand Rand with the carbon atoms forming the bond between the pyridine rings.


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