The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Jan. 17, 2012
Junichi Tsuchiya, Kawasaki, JP;
Daichi Takaki, Kawasaki, JP;
Masatoshi Arai, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Junichi Tsuchiya, Kawasaki, JP;
Daichi Takaki, Kawasaki, JP;
Masatoshi Arai, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, wherein the base component (A) includes a polymeric compound (A1) having a structural unit (a5) represented by general formula (a5-1). In the formula (a5-1), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; each of Rand Rindependently represents a hydrocarbon group which may have a substituent, and Rand Rmay be mutually bonded to form a ring.