The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Feb. 24, 2012
Carlton Grant Willson, Austin, TX (US);
Tsuyoshi Ogawa, Kawagoe, JP;
Michael W. Lin, Houston, TX (US);
Daniel J. Hellebusch, Berkeley, CA (US);
B. Michael Jacobsson, Fort Worth, TX (US);
William K. Bell, Austin, TX (US);
Carlton Grant Willson, Austin, TX (US);
Tsuyoshi Ogawa, Kawagoe, JP;
Michael W. Lin, Houston, TX (US);
Daniel J. Hellebusch, Berkeley, CA (US);
B. Michael Jacobsson, Fort Worth, TX (US);
William K. Bell, Austin, TX (US);
Board of Regents, The University of Texas System, Austin, TX (US);
Abstract
An imprint lithography release agent having general formula (1): where Rrepresents H or CH, n is an integer from 1 to 5, and m is an integer from 1 to 40. Fluorinated silazanes of general formula (1) can be used to form a release layer on an imprint lithography template, added to an imprint lithography resist, or both.