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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8926859 B1

PDFFull Text
Expired
Date of Patent:
Jan. 06, 2015

Filed:

Jul. 05, 2010

Polishing composition for silicon wafers

Applicants:

Masahiko Suzuki, Wakayama, JP;

Mami Okamura, Wakayama, JP;

Toshiaki Oi, Wakayama, JP;

Inventors:

Masahiko Suzuki, Wakayama, JP;

Mami Okamura, Wakayama, JP;

Toshiaki Oi, Wakayama, JP;

Assignee:

Kao Corporation, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Allan Olsen

Assistant Examiner:

Margaret D Klunk

Int. Cl.
CPC ...
C09K 13/00 (2006.01); H01L 21/302 (2006.01); H01L 21/461 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); H01L 21/02 (2006.01); B24B 37/04 (2012.01); C09G 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02024 (2013.01); B24B 37/044 (2013.01); C09G 1/02 (2013.01);
Abstract

A polishing composition for a silicon wafer includes a macromolecular compound, an abrasive, and an aqueous medium. The macromolecular compound includes a constitutional unit (a1) represented by the following general formula (1), a constitutional unit (a2) represented by the following general formula (2), and a constitutional unit (a3) represented by the following general formula (3). The total of the constitutional unit (a3) is 0.001 to 1.5 mol % of all the constitutional units of the macromolecular compound.

Find Patent Forward Citations

Suzuki, Masahiko. (2015). Polishing composition for silicon wafers (U.S. Patent No. 8926859). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8926859

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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