The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2014

Filed:

Apr. 02, 2012
Applicants:

Hyeon-jin Shin, Gyeonggi-do, KR;

Jae-young Choi, Gyeonggi-do, KR;

Ji-hoon Park, Seoul, KR;

Joung-real Ahn, Gyeonggi-do, KR;

Inventors:

Hyeon-jin Shin, Gyeonggi-do, KR;

Jae-young Choi, Gyeonggi-do, KR;

Ji-hoon Park, Seoul, KR;

Joung-real Ahn, Gyeonggi-do, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/02 (2006.01); C01B 31/04 (2006.01); H01L 29/16 (2006.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
H01L 21/02587 (2013.01); H01L 21/0243 (2013.01); C01B 31/0461 (2013.01); H01L 21/02378 (2013.01); H01L 29/1606 (2013.01); H01L 29/0657 (2013.01); H01L 21/0237 (2013.01); B82Y 40/00 (2013.01); H01L 21/02658 (2013.01); B82Y 30/00 (2013.01); H01L 21/02612 (2013.01); H01L 21/02491 (2013.01); H01L 21/02527 (2013.01);
Abstract

A three-dimensional graphene structure, and methods of manufacturing and transferring the same including forming at least one layer of graphene having a periodically repeated three-dimensional shape. The three-dimensional graphene structure is formed by forming a pattern having a three-dimensional shape on a surface of a substrate, and forming the three-dimensional graphene structure having the three-dimensional shape of the pattern by growing graphene on the substrate on which the pattern is formed. The three-dimensional graphene structure is transferred by injecting a gas between the three-dimensional graphene structure and the substrate, separating the three-dimensional graphene structure from the substrate by bonding the three-dimensional graphene structure to an adhesive support, combining the three-dimensional graphene structure with an insulating substrate, and removing the adhesive support.


Find Patent Forward Citations

Loading…