The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Nov. 12, 2010
Toru Iwaya, Hitchinaka, JP;
Sakae Kobori, Shirosato, JP;
Tomohisa Ohtaki, Hitachinaka, JP;
Haruhiko Hatano, Hitachinaka, JP;
Toru Iwaya, Hitchinaka, JP;
Sakae Kobori, Shirosato, JP;
Tomohisa Ohtaki, Hitachinaka, JP;
Haruhiko Hatano, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.