The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Jul. 18, 2012
Applicants:
Koji Ichikawa, Osaka, JP;
Yukako Anryu, Osaka, JP;
Shingo Fujita, Osaka, JP;
Inventors:
Assignee:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/38 (2006.01); C07C 303/32 (2006.01); C07C 309/06 (2006.01); C07C 309/12 (2006.01); C07D 333/46 (2006.01); C07D 335/02 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); G03F 7/38 (2013.01); C07C 303/32 (2013.01); C07D 335/02 (2013.01); C07D 333/46 (2013.01); C07C 309/06 (2013.01); C07C 309/12 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); G03F 7/2041 (2013.01); Y10S 430/108 (2013.01); Y10S 430/111 (2013.01); Y10S 430/122 (2013.01); Y10S 430/123 (2013.01);
Abstract
A resist composition having a resin having a structural unit represented by the formula (I), a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid and not including the structural unit represented by the formula (I), and an acid generator represented by the formula (II), wherein R, A, R, R, R, L, Y, R, R, R, R, R, n, s and Rare defined in the specification.
Ichikawa, Koji. (2014). Resist composition and method for producing resist pattern (U.S. Patent No. 8921029). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8921029
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile