The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Dec. 15, 2011
Applicants:
Ryuichi Serizawa, Tokyo, JP;
Nobuji Matsumura, Tokyo, JP;
Hirokazu Sakakibara, Tokyo, JP;
Inventors:
Assignee:
JSR Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/029 (2006.01); G03F 7/039 (2006.01); C08F 220/28 (2006.01); C08F 8/34 (2006.01); C08F 220/18 (2006.01); C08F 220/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); G03F 7/029 (2013.01); G03F 7/039 (2013.01); G03F 7/0046 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); C08F 220/18 (2013.01); C08F 220/28 (2013.01); C08F 220/38 (2013.01); C08F 8/34 (2013.01); Y10S 430/111 (2013.01); Y10S 430/12 (2013.01); Y10S 430/122 (2013.01); Y10S 430/126 (2013.01);
Abstract
A radiation-sensitive resin composition includes an acid-labile group-containing resin, and a compound shown by the following general formula (i). Rrepresents a hydrogen atom or the like, Rrepresents a single bond or the like, Rrepresents a linear or branched unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms or the like, and Xrepresents an onium cation.