The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Jun. 01, 2005
Shunji Watanabe, Setagaya-ku, JP;
Masato Hamatani, Kounosu, JP;
Tatsuya Kitamoto, Totsuka-ku, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A method for quickly removing pollutants adhered to a predetermined optical member in an optical system. To remove the pollutants adhered to a lens (A) disposed at the upper end of a projection optical system (PL), a cylindrical protecting member () is disposed through the openings in a reticle stage () and a reticle base (). The bottom surface of a support section () at the tip section of a rod section () is brought into contact with the surface of the lens (A) through the inner surface of the protecting member (). A wiping cloth soaked with a washing solution containing hydrofluoric acid is attached to the bottom surface of the support section (). The support section () is reciprocated via the rod section () to remove the pollutants on the lens (A) with the wiping cloth.