The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Feb. 13, 2012
Jinchun LI, Shanghai, CN;
Jie Fang, Shanghai, CN;
Yeqin Zheng, Shanghai, CN;
Hai Xia, Shanghai, CN;
Liwei Wu, Shanghai, CN;
Jinchun Li, Shanghai, CN;
Jie Fang, Shanghai, CN;
Yeqin Zheng, Shanghai, CN;
Hai Xia, Shanghai, CN;
Liwei Wu, Shanghai, CN;
Shanghai Micro Electronics Equipment Co., Ltd., Shanghai, CN;
Abstract
A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform () is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (), air floating elements () disposed on a bottom of the aerostatic bearing plate () and a vacuum pre-tightening structure () disposed on the aerostatic bearing plate (). The vacuum pre-tightening structure () is coupled to the aerostatic bearing plate () in a split fashion. Separation of the air floating elements () from the vacuum pre-tightening structure () prevents the aerostatic bearing plate () from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.