The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2014
Filed:
Sep. 24, 2012
Applicant:
Mattson Technology, Inc., Fremont, CA (US);
Inventor:
Paul Janis Timans, Mountain View, CA (US);
Assignee:
Mattson Technology, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01J 5/08 (2006.01); G01J 5/52 (2006.01); G01J 5/58 (2006.01); H01L 21/67 (2006.01); H01L 21/324 (2006.01); G01J 5/06 (2006.01); G01J 5/00 (2006.01);
U.S. Cl.
CPC ...
G01J 5/58 (2013.01); G01J 2005/065 (2013.01); G01J 5/089 (2013.01); G01J 5/522 (2013.01); G01J 5/0803 (2013.01); G01J 5/0821 (2013.01); G01J 5/06 (2013.01); G01J 5/0831 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); G01J 5/0285 (2013.01); G01J 5/0846 (2013.01); H01L 21/324 (2013.01); G01J 2005/0048 (2013.01); G01J 5/08 (2013.01); G01J 5/0003 (2013.01); G01J 5/0007 (2013.01);
Abstract
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.