The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2014
Filed:
Sep. 23, 2011
Applicants:
Jeng-hsing Jang, Taoyuan County, TW;
Yi-nan Chen, Taoyuan County, TW;
Hsien-wen Liu, Taoyuan County, TW;
Inventors:
Jeng-Hsing Jang, Taoyuan County, TW;
Yi-Nan Chen, Taoyuan County, TW;
Hsien-Wen Liu, Taoyuan County, TW;
Assignee:
Nanya Technology Corporation, Taoyuan, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/04 (2006.01); B08B 17/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 17/025 (2013.01); H01L 21/67051 (2013.01); H01L 21/6715 (2013.01); Y10S 134/902 (2013.01);
Abstract
A wafer scrubber is disclosed, including a chamber, and a holder connecting to a spindle disposed in the chamber, wherein the holder supports a wafer, and the wafer spins to remove water on the wafer, and a meshed inner cup comprising a plurality of through holes disposed between the holder and a wall of the chamber, wherein the meshed inner cup receives water from a surface of the wafer and rotates around the spindle to release the water through the through holes.