The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2014

Filed:

Dec. 27, 2012
Applicant:

Michael Vogtmann, Paso Robles, CA (US);

Inventor:

Michael Vogtmann, Paso Robles, CA (US);

Assignee:

Strasbaugh, Inc., San Luis Obispo, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 55/06 (2006.01); B24B 7/22 (2006.01); B24B 9/06 (2006.01);
U.S. Cl.
CPC ...
B24B 55/06 (2013.01); B24B 7/228 (2013.01); B24B 9/065 (2013.01);
Abstract

A vacuum assembly for removing debris formed on the surface of a work chuck after a wafer grinding process by positioning a vacuum source above the work chuck and then activating the vacuum source.


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