The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2014

Filed:

Feb. 28, 2013
Applicant:

Rigaku Corporation, Akishima-shi, JP;

Inventors:

Masaru Kuribayashi, Akishima, JP;

Masahiro Nonoguchi, Hino, JP;

Masashi Kageyama, Ome, JP;

Assignee:

Rigaku Corporation, Akishima-Shi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/06 (2006.01); H01J 1/88 (2006.01); H01J 3/02 (2006.01); H01J 35/14 (2006.01);
U.S. Cl.
CPC ...
H01J 1/88 (2013.01); H01J 35/06 (2013.01); H01J 3/027 (2013.01); H01J 35/14 (2013.01);
Abstract

An electron gun having: a cathode for emitting electrons; a first Wehnelt electrode equipped with a first aperture through which electrons are allowed to pass; and a second Wehnelt electrode that is equipped with a second aperture disposed at a predetermined position with respect to the cathode and the first aperture, and that is furnished at a position closer to the cathode than the first Wehnelt electrode, wherein: the cathode and the second Wehnelt electrode are included within a single assembly constituting a unitary body; and the assembly is detachably attached to the first Wehnelt electrode. Replacement of the cathode can be performed by detaching the cathode unit from the first Wehnelt electrode, and then ejecting the cathode unit out from the Wehnelt cover. The emitter of the cathode can thereby be reliably positioned with respect to the second aperture.


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