The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2014
Filed:
Aug. 27, 2012
Applicant:
Siu-kei Tin, Milpitas, CA (US);
Inventor:
Siu-Kei Tin, Milpitas, CA (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01); G01B 11/02 (2006.01); G01N 21/00 (2006.01); G01B 9/02 (2006.01); G01B 11/16 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02094 (2013.01); G01B 11/162 (2013.01);
Abstract
A surface roughness value and a sub-surface scattering property of a material are estimated. The material is illuminated with a light beam with controlled coherence properties at multiple incident angles. Multiple speckle patterns are recorded, each speckle pattern being recorded for a respective one of the multiple incident angles. Both of a surface roughness value and a sub-surface scattering property of the material are estimated by calculations using the multiple speckle patterns and the incident angle for each such speckle pattern.