The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2014

Filed:

Nov. 09, 2012
Applicant:

Semiconductor Physics Laboratory Co., Ltd., Budapest, HU;

Inventors:

Jacek Lagowski, Tampa, FL (US);

Marshall D. Wilson, Tampa, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 31/305 (2006.01); G01R 31/308 (2006.01); G01R 31/26 (2014.01); G01R 31/265 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2656 (2013.01); G01R 31/305 (2013.01); G01R 31/308 (2013.01); G01R 31/2648 (2013.01);
Abstract

A method is described for accurate measuring of the excess carrier lifetime on a semiconductor sample from the carrier decay after termination of the excitation pulse imposed on the steady-state carrier excitation. The method includes determining a quality of decay parameter using progressing segments in each carrier decay; establishing an accurate lifetime measurement multiparameter domain for experimental variables whereby the quality of decay parameter falls within prescribed limits from the ideal exponential decay value of QD=1; and determining an excess carrier lifetime for the semiconductor sample based on experimental measurement conditions within the domain and the quality of decay value within the predetermined range indicative of an accurate excess carrier lifetime measurement.


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