The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2014

Filed:

Jun. 02, 2009
Applicants:

Seiya Nakai, Chikushi-gun, JP;

Shinichi Sakurada, Chuo-ku, JP;

Inventors:

Seiya Nakai, Chikushi-gun, JP;

Shinichi Sakurada, Chuo-ku, JP;

Assignees:

Adwelds Corporation, Fukuoka, JP;

Elpida Memory, Inc., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23P 19/00 (2006.01); H01L 21/687 (2006.01); H01L 23/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); H01L 2224/75 (2013.01); H01L 2924/01005 (2013.01); H01L 2924/014 (2013.01); H01L 21/68728 (2013.01); H01L 2224/758 (2013.01); H01L 2224/16 (2013.01); H01L 2924/01006 (2013.01); H01L 2924/01033 (2013.01); H01L 24/75 (2013.01); H01L 2924/01082 (2013.01); H01L 2924/01075 (2013.01); H01L 21/68742 (2013.01); H01L 2924/01004 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/01013 (2013.01); H01L 2924/01023 (2013.01); Y10S 269/903 (2013.01);
Abstract

The purpose of the invention is to provide a mounting apparatus that can mount a part such as a chip, etc. on a substrate effectively and precisely. A wafer is placed on the upper surface of turntable, which has opening section, and a backup section and a head section that hold a chip are lifted up and lowered respectively, at opening section. The wafer and the chip are contacted, pinched and held locally, and then they are heat-bonded. After that, the backup section and the head section are removed. Lift arms equipped on a holding table are inserted between the wafer and turntable, the wafer is lifted up, and opening section is moved relative to the wafer when turntable is rotated. The wafer is placed on turntable again and the bonding process is performed.


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