The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2014

Filed:

May. 10, 2013
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Chi-Sheng Peng, Yangmei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01); H01L 29/66666 (2013.01);
Abstract

A memory device and a manufacturing method of the same are provided. The memory device includes a substrate, a memory material layer, a first dielectric layer, a first gate layer, a second gate layer, and a source/drain (S/D) region. The substrate has a trench, and the memory material layer is formed on a sidewall of the trench. The first gate layer, the second gate layer, and the first dielectric layer, which is formed between the first gate layer and the second gate layer, are filled in the trench. The source/drain region is formed in the substrate and adjacent to the memory material layer. The first gate layer is extended in a direction perpendicular to a direction in which the source/drain region is extended.


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