The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Aug. 01, 2012
Applicants:
Oliver V. Naumovski, Peabody, MA (US);
Shardul Patel, North Reading, MA (US);
Charles A. Teodorczyk, Danville, NH (US);
Inventors:
Oliver V. Naumovski, Peabody, MA (US);
Shardul Patel, North Reading, MA (US);
Charles A. Teodorczyk, Danville, NH (US);
Assignee:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/06 (2006.01); H01Q 9/04 (2006.01);
U.S. Cl.
CPC ...
H01J 49/062 (2013.01); H01Q 9/04 (2013.01);
Abstract
A composite electrostatic rod may include a body comprising a length L and cross sectional area A. The body may include an outer portion comprising a first material, and a core comprising a second material different than the first material and surrounded by the outer portion, wherein a natural frequency of the composite electrostatic rod is greater than that of a graphite rod having the length L and cross sectional area A.