The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Sep. 10, 2012
Jerry Johannes Martinus Peijster, Maartensdijk, NL;
Rogier Martin Lambert Ellenbroek, Delfgauw, NL;
Guido DE Boer, Leerdam, NL;
Jerry Johannes Martinus Peijster, Maartensdijk, NL;
Rogier Martin Lambert Ellenbroek, Delfgauw, NL;
Guido De Boer, Leerdam, NL;
Mapper Lithography IP B.V., Delft, NL;
Abstract
The invention relates to a vibration isolation module () for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (), an intermediate body () and a support body () for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod () such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module.