The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Aug. 08, 2013
Applicant:
Ev Group Gmbh, St. Florian, AT;
Inventor:
Erich Thallner, St. Florian, AT;
Assignee:
EV Group GmbH, St. Florian, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); B32B 43/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B32B 43/006 (2013.01); H01L 21/67092 (2013.01); Y10S 156/93 (2013.01); Y10S 156/931 (2013.01); Y10S 156/932 (2013.01); Y10S 156/941 (2013.01); Y10S 156/943 (2013.01);
Abstract
A device for releasing an interconnect layer that provides a connection between a carrier and a wafer which forms a carrier-wafer combination. The device includes rotation means for rotation of the carrier-wafer combination in a release position, and a connection release means for providing an immersion bath that receives the carrier-wafer combination.