The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Aug. 26, 2011
Jimmy D. Collins, Allen, TX (US);
Samuel A. Cooper, Carrollton, TX (US);
James M. Eppes, Allen, TX (US);
Alan D. Rose, Wylie, TX (US);
Kader Mekias, Sachse, TX (US);
Jimmy D. Collins, Allen, TX (US);
Samuel A. Cooper, Carrollton, TX (US);
James M. Eppes, Allen, TX (US);
Alan D. Rose, Wylie, TX (US);
Kader Mekias, Sachse, TX (US);
Tel FSI, Inc., Chaska, MI (US);
Abstract
Apparatuses, and related methods, for processing a workpiece that include a particular barrier structure that can overlie and cover a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular movable member that can be positioned over and moved relative to a workpiece. Apparatuses, and related methods, for processing a workpiece that include a particular ceiling structure that can overlie a processing chamber. Nozzle devices, and related methods, that include a particular annular body. Nozzle devices, and related methods, that include a particular first, second, and third nozzle structure.