The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2014

Filed:

Nov. 21, 2012
Applicant:

Micronas Gmbh, Freiburg, DE;

Inventors:

Christoph Senft, Munich, DE;

Stefan Simon, Munich, DE;

Walter Hansch, Mitterfels, DE;

Assignee:

Micronas GmbH, Freiburg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 7/00 (2006.01); H01L 29/66 (2006.01); G01N 27/00 (2006.01); G01N 27/414 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66 (2013.01); G01N 27/00 (2013.01); G01N 27/4143 (2013.01); G01N 33/004 (2013.01);
Abstract

A semiconductor gas sensor is provided that has a gas-sensitive gate electrode separated by a gap from a channel region and is embodied as a suspended gate field effect transistor or the gate electrode is arranged as a first plate of a capacitor with gap and a second plate of the capacitor is connected to a gate of the field effect transistor embodied as capacitively controlled and the gate electrode has a conductive carrier layer with a bearing adhesion promoter layer and a gas-sensitive layer bearing on the adhesion promoter layer, wherein the gate electrode as a gas-sensitive layer has a platinum/gold alloy with a gold proportion in a range of 1% to 20% and a polymer layer with a thickness of less than 100 nm is embodied on the surface of the platinum/gold alloy and the gap is filled with an oxygen-free gas mixture.


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