The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Oct. 21, 2010
Applicant:
Juying Dou, San Jose, CA (US);
Inventor:
Juying Dou, San Jose, CA (US);
Assignee:
Hermes Microvision, Inc., Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/15 (2006.01); H01J 19/08 (2006.01); H01K 1/02 (2006.01); H01J 37/065 (2006.01);
U.S. Cl.
CPC ...
H01J 1/15 (2013.01); H01J 37/065 (2013.01); H01J 2237/06316 (2013.01); H01J 2237/061 (2013.01); H01J 2237/0216 (2013.01);
Abstract
This invention relates to a filament for electron emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source. Embodiments of the present invention discloses method with which a Re (Rhenium) is used as heat source such that vibration issue of prior tungsten filament can be depressed.