The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2014

Filed:

Jun. 25, 2012
Applicants:

Kazufumi Suenaga, Tsuchiura, JP;

Kenji Shibata, Tsukuba, JP;

Kazutoshi Watanabe, Tsuchiura, JP;

Akira Nomoto, Kasumigaura, JP;

Fumimasa Horikiri, Nagareyama, JP;

Inventors:

Kazufumi Suenaga, Tsuchiura, JP;

Kenji Shibata, Tsukuba, JP;

Kazutoshi Watanabe, Tsuchiura, JP;

Akira Nomoto, Kasumigaura, JP;

Fumimasa Horikiri, Nagareyama, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/083 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
H01L 41/0805 (2013.01); H01L 41/1873 (2013.01); H01L 41/316 (2013.01);
Abstract

There is provided a piezoelectric film having an alkali niobate-based perovskite structure expressed by a general formula (NaKLi)NbO(0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1), wherein the alkali niobate has a crystal structure of a pseudo-cubic crystal, a tetragonal crystal, an orthorhombic crystal, a monoclinic crystal, a rhombohedral crystal, or has a crystal structure of coexistence of them, and when total of K—O bonding and K-Metal bonding is set as 100% in a binding state around K-atom of the alkali niobate, a K—O bonding ratio is 46.5% or more and a K-Metal bonding ratio is 53.5% or less, wherein the Metal indicates a metal atom included in the piezoelectric film.


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