The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2014

Filed:

Jul. 14, 2011
Applicants:

Pieter Kruit, Delft, NL;

Jacob Pieter Hoogenboom, De Meern, NL;

Aernout Christiaan Zonnevylle, Dordrecht, NL;

Inventors:

Pieter Kruit, Delft, NL;

Jacob Pieter Hoogenboom, De Meern, NL;

Aernout Christiaan Zonnevylle, Dordrecht, NL;

Assignee:

Delmic B.V., JD Delft, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 21/62 (2006.01); H01J 37/22 (2006.01); H01J 37/256 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/22 (2013.01); H01J 2237/2445 (2013.01); H01J 37/26 (2013.01); H01J 37/228 (2013.01); H01J 2237/2482 (2013.01); H01J 37/256 (2013.01); H01J 2237/204 (2013.01); H01J 37/28 (2013.01); G01N 2021/625 (2013.01); H01J 2237/2808 (2013.01); H01J 37/226 (2013.01); G01N 21/62 (2013.01);
Abstract

An inspection apparatus is provided comprising in combination at least an optical microscope () and an ion- or electron microscope () equipped with a source () for emitting a primary beam () of radiation to a sample () in a sample holder. The apparatus may comprise a detector () for detection of secondary radiation () backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device () to receive in use luminescence light () emitted by the sample and to focus it on a photon-detector ().


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