The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 25, 2014

Filed:

Aug. 17, 2010
Applicants:

Byeong-jin Lee, Yongin-si, KR;

Hong-sick Park, Suwon-si, KR;

Tai-hyung Rhee, Daejeon, KR;

Yong-sung Song, Daejeon, KR;

Choung-woo Park, Daejeon, KR;

Jong-hyun OH, Boryeong-si, KR;

Inventors:

Byeong-Jin Lee, Yongin-si, KR;

Hong-Sick Park, Suwon-si, KR;

Tai-Hyung Rhee, Daejeon, KR;

Yong-Sung Song, Daejeon, KR;

Choung-Woo Park, Daejeon, KR;

Jong-Hyun Oh, Boryeong-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C09K 13/10 (2006.01); C23F 1/10 (2006.01); C23F 1/44 (2006.01); H01L 21/3213 (2006.01); H01L 27/12 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
C09K 13/10 (2013.01); C23F 1/10 (2013.01); C23F 1/44 (2013.01); H01L 21/32134 (2013.01); H01L 27/1259 (2013.01); H01L 29/4908 (2013.01); H01L 27/124 (2013.01);
Abstract

The present invention relates to an etchant for etching metal wiring, and the metal wiring etchant according to the present invention includes hydrogen peroxide at about 5 wt % to about 15 wt %, an oxidant at about 0.5 wt % to about 5 wt %, a fluoride-based compound at about 0.1 wt % to about 1 wt %, a nitrate-based compound at about 0.5 wt % to about 5 wt %, and a boron-based compound at about 0.05 wt % to about 1 wt %.


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