The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Aug. 27, 2012
Applicants:
Kallol Bera, San Jose, CA (US);
Shahid Rauf, Pleasanton, CA (US);
Leonid Dorf, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Ajit Balakrishna, Sunnyvale, CA (US);
Gary Leray, Mountain View, CA (US);
Inventors:
Kallol Bera, San Jose, CA (US);
Shahid Rauf, Pleasanton, CA (US);
Leonid Dorf, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Ajit Balakrishna, Sunnyvale, CA (US);
Gary Leray, Mountain View, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/46 (2006.01); H01J 37/32 (2006.01); H05H 7/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3233 (2013.01); H05H 7/001 (2013.01); H05H 1/46 (2013.01);
Abstract
A plasma reactor employs an e-beam source to generate plasma, and the e-beam source has a configurable magnetic shield.