The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Feb. 09, 2011
Tatsuya Nagahama, Kawasaki, JP;
Koji Kubo, Kawasaki, JP;
Hidemitsu Asano, Kawasaki, JP;
Jyota Miyakura, Kawasaki, JP;
Tatsuya Nagahama, Kawasaki, JP;
Koji Kubo, Kawasaki, JP;
Hidemitsu Asano, Kawasaki, JP;
Jyota Miyakura, Kawasaki, JP;
Mitutoyo Corporation, Kanagawa, JP;
Abstract
A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.